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NEMS-Based Infrared Metamaterial via Tuning Nanocantilevers Within Complementary Split Ring Resonators

TitleNEMS-Based Infrared Metamaterial via Tuning Nanocantilevers Within Complementary Split Ring Resonators
Publication TypeJournal Article
Year of Publication2017
AuthorsWang, QG, Mao, DP, Liu, P, Koschny, T, Soukoulis, CM, Dong, L
JournalJournal of Microelectromechanical Systems
Volume26
Pagination1371-1380
Date Published12
Type of ArticleArticle
ISBN Number1057-7157
Accession NumberWOS:000417784500023
Keywords&, electro-optic modulation, Engineering, gratings, Instrumentation, metamaterial, nanocantilever, Nanoelectromechanical systems (NEMS), photonic metamaterials, physics, reconfigurable plasmonic metamaterial, resonances, superlens, Technology - Other Topics, transmission
Abstract

f megahertz (MHz). Here, we report on a nanoelectromechanical systems (NEMS)-based tunable IR metamaterial realized by unique embedding of nanocantilevers into complementary split ring resonators (c-SRRs) suspended over individual wells. The optical field confined in the air gap of the c-SRR is strongly influenced by electrostatically induced mechanical deflection of the nanocantilever, thus modulating the reflection spectrum of the metamaterial. With the easy-to-implement tunable meta-atom design, the IR metamaterial with 800-nm-long cantilevers provides an ultrahigh mechanical modulation frequency of 32.26 MHz for optical signal modulation at a wavelength of 2.1 mu m, and is rather easy to manufacture and operate. We envision a compact, efficient, and high-speed electrooptic modulation platform in the IR region using this NEMS tunable metamaterial technology. [2017-0012]

DOI10.1109/jmems.2017.2746688
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Metamaterials