Ultrafast laser direct-write actuable microstructures

TitleUltrafast laser direct-write actuable microstructures
Publication TypeJournal Article
Year of Publication2008
AuthorsTapalian HC, Langseth J, Chen Y, Anderegg JW, Shinar J
Journal TitleApplied Physics Letters
Volume93
Pages243304
Date Published12/15
ISBN Number0003-6951
Accession NumberISI:000261896400077
Keywordsdegradation, ELECTROLUMINESCENCE, high-speed optical techniques, laser materials processing, micromechanical devices, optical modulation, pulses
Abstract

Actuable microelectromechanical systems (MEMS), fabricated by direct "writing" of deformable membranes on indium tin oxide/copper phthalocyanine (CuPc)/Al microstructures using 130 fs laser pulses, are described. The pulses locally ablate the CuPc without requiring micromachined release holes, demonstrating a novel material release mechanism. The direct-write procedure therefore requires fewer processing steps than traditional MEMS approaches. Using it, we fabricated optical modulators with phase modulation depths >pi, intensity modulation amplitudes >50%, and bandwidths >100 kHz, at 5-10 V drive voltage. Fabrication of numerous microstructures and nanostructures can be envisioned, including photonic crystals and optical phased-array gratings.

URL<Go to ISI>://000261896400077
DOI10.1063/1.2972116