JEOL JAMP-7830F Auger Microprobe

JEOL JAMP-7830F Auger Microprobe

  • Hemispherical Mirror Analyzer
  • Cooling/heating stage, fracture stage
  • Ion depth profiling
  • Orientation Imaging Microscopy (OIM)
  • Reflected Electron Energy Loss Spectroscopy and Microscopy
Auger Instrument The TFEG provides the highest spatial resolution available for Auger spot analysis, Auger mapping and secondary electron imaging. TFEG optical system performs at 0.5 to 25kV with 5nm SEI resolution and 15nm Auger resolution. HSA offers both high-energy resolution for spectroscopy studies and high sensitivity mode for trace detectability. The HSA, capable of electrically controlling its energy resolution from 0.05% to 0.5%, enables chemical state analysis at high-energy resolution as well as high sensitivity composition analysis and REELS. The ability to measure chemical state differences results from the high-energy resolution, which enables the measurement of the differences of chemical shifts for compounds versus pure elements. In addition this instrument is equipped with a heating stage, allowing specimen temperatures to be increased from room temperature to 800ÂșC, and a UHV specimen cooling and fracture device for in-situ fracture analysis. This instrument is also equipped with energy dispersive spectroscopy (EDS), backscatter electron detector (BED) and residual gas analyzer (RGA). The addition of a fully automated stage and a user friendly workstation-based automation system make the JAMP-7830F a uniquely simple instrument to operate. All data are stored in both ISO data file and TIFF image formats for convenient transfer and further processing.